Integrated circuit equipment

Category: Industry Applications

Release time: 2026-03-30

The IG320 series cryopumps are used in ion implanters.

 

In the core process of integrated circuit manufacturing—the ion implantation step—stringent requirements are imposed on the stability and cleanliness of the vacuum environment. This figure illustrates the typical applications of the IG series cryopumps in this industry. Of particular note is the IG320 series cryopump, which, thanks to its outstanding pumping performance and high reliability, has been successfully deployed in ion implanters. This product line effectively captures residual gases such as water vapor and hydrogen, providing an ultra-high vacuum environment that ensures stable ion-beam transmission, thereby significantly enhancing wafer‑level implantation uniformity and yield.

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