Cryopump

Cryopump is a equipment using 10K (-263 ) cryocooler as a cold source through the principle of cryocondensation, cryoadsorption to achieve high vacuum and oil-free effect.

 

Cryopumps are widely used in the following areas:

    1) Semiconductors, integrated circuits, optoelectronic devices coating process;

    2) Optical lens coating;

    3) Magnetron sputtering coating line;

    4) Space environment simulation;

5) Vacuum elimination.

 

The main features of Cryopump

1) Adsorption vacuum pump

2) Without rough-pump;

    3) Regeneration is required;

    4) Different pumping speed and pumping capacity for different gases

 

The main advantage of Cryopump:

     1) High ultimate vacuum. The standard model up to 10-6Pa, the special requirements up to 10-7Pa or above;

     2) High pumping speed: Ultra-high pumping speed for the air, especially for water vapor unmatched by other vacuum pumps;

     3) Relatively clean.

     4) Low operating cost

     5) Safe and reliable

     6) Easy to use

     7) Long operation life




Detail and parameter of standard cryopump

Detail and parameters of large customized diameter cryopump