IG200 Cryopump
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IG200 Cryopump
- DESCRIPTION
-
The IG series cryopumps are fully intelligent units featuring rapid and complete regeneration capabilities, as well as a remote‑monitoring‑enabled regeneration control system. Standard models include: IG200, IG200F, IG200F‑XP, IG250, IG250F, IG320, IG320F, IG400, IG500, IG550, IG1000, IG1250, IG1320, IG1600, IG1800, and others.
For general-purpose parameters, refer to the DZB series.
Key features:
1) Possesses rapid regeneration capability2) Possesses complete regenerative capabilities
3) Automatic detection of the vacuum level of the cryopump
4) Fully automatic regeneration system with internal heating and nitrogen purging
5) External nitrogen charging device
6) Configure a safety valve that can be connected to an exhaust gas treatment system.
7) Intelligent “Adaptive” Technology
- Automatic low-temperature thermal load compensation
- Variable-frequency motor system
8) Lower acquisition cost
- Each compressor can support more pumps.
- More energy-efficient without any change in production capacity
- The variable-speed motor can maximize the pump’s service life.
9) Supports local or remote operation.
10) Equipped with an operation handle, enabling fault diagnosis and parameter modification.
PVD-Specific Series Cryopump Parameters
Model
IG200F-XP
IG200F
IG250F
IG320F Pumping speed
Pumping speed (L/s)
H₂O
4000
4000
6500
11000 N₂
330
1500
2500
4000 H₂
800
2200
3600
5000 Ar
275
1200
1800
3000 Pumping capacity Ar
1500
1000
2000
2800 Pumping
capacity(std.L)
H₂
12
12
20
32 Cooling Time (Min)
90
90
110
120 Full Regeneration Time (Min)
150
150
130
150 Auto-regeneration technology
There is
There is
There is
There is Variable frequency technology
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There is
There is
There is Parameters of the Low-Temperature Pump Series for Ion Implantation
Model
IG200FX
IG250FX IG320FX Vacuum flange
200
250 320
Pumping speed
Pumping speed (L/s)
H₂O
4000
6500 11000
Air
2200
2200 3600
H₂
3500
7000 13000
Ar
1150
1800 3000
Pumping capacity H₂
Pumping capacity (std.
15
25 35
Cooling Time (Min)
90
110 120
Full Regeneration Time (Min)
100
130 150
Fast Regeneration Time (Min)
50
90 75
Auto-regeneration technology
There is
There is There is
Variable frequency technology
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There is There is
IG200 Cryopump
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IG200 Cryopump
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Company Address: No. 338, Qianfang Avenue, Xianhua Sub-district, Pujiang County, Jinhua City, Zhejiang Province
After-sales phone number:15727902022,0579-8419 3027,0551-62879130
Email:Marketing@bwokai.com
