Small-caliber Cryopump
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Small-caliber Cryopump
- DESCRIPTION
-
1. A positive displacement vacuum pump that requires no backing pump during operation.
2. Requires regeneration.
3. It exhibits different pumping speeds and pumping capacities for different gases.
4. Supports the Modbus protocol.
Model DZB200 DZB250 DZB300 DZB400 DZB500 DZB550 Pumping speed
Pumping speed (L/s)
N₂
1,700
2,700
2,500 4,000 6,000 10,000 15,000 H₂ 3,600 5,000 12,000 16,000 25,000 Ar 1,400 2,000 3,500 5,000 8,400 14,000 H₂O 4,000 6,900 9,500 16,000 30,000 39,000 Ultimate vacuum degree
Ultimate pressure (Pa)
10⁷ 10⁷ 10⁷ 10⁷ 10⁷ 10⁷ Maximum Conductivity
throughput (Pa ·L/s)
Ar
1.2×10³
1.2×10³
1.0×10³
1.4×10³
1.1×10³
4.1×10³
Pumping capacity
Pumping
capacity(Pa ·L)
Ar
H₂
1.0×10⁸ 1.0×10⁸ 2.1×10⁸ 4.3×10⁸ 5.8×10⁸ 8.1×10⁸ 1.0×10⁵ 6.7×10⁵ 1.0×10⁶ 2.4×10⁶ 4.6×10⁶ 8.5×10⁶ Cooling time
Cooldown time(min)
100 110 110 120 130 180 Pump outlet flange
Mounting flange
G B. ANSI, ISO, UVG Weight
Weight of cryopump(Kg)
33 37 48 75 86 98 Matching compressor
Compressor unit
HC50W HC50W HC80W HC100W HC100W HC100W
Small-caliber Cryopump
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Small-caliber Cryopump
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Company Address: No. 338, Qianfang Avenue, Xianhua Sub-district, Pujiang County, Jinhua City, Zhejiang Province
After-sales phone number:15727902022,0579-8419 3027,0551-62879130
Email:Marketing@bwokai.com
