IG500 Cryopump
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IG500 Cryopump
- DESCRIPTION
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The IG series cryopumps are fully intelligent units featuring rapid and complete regeneration capabilities, along with a remote‑monitoring‑enabled regeneration control system. Standard models include: IG200, IG200F, IG200F‑XP, IG250, IG250F, IG320, IG320F, IG400, IG500, IG550, IG1000, IG1250, IG1320, IG1600, IG1800, and others.
For general-purpose parameters, refer to the DZB series.
Key features:
1) Possesses rapid regeneration capability2) Possesses complete regenerative capabilities
3) Automatic detection of the vacuum level of the cryopump
4) Fully automatic regeneration system with internal heating and nitrogen purging
5) External nitrogen charging device
6) Configure a safety valve that can be connected to an exhaust gas treatment system.
7) Intelligent “Adaptive” Technology
- Automatic low-temperature thermal load compensation
- Variable-frequency motor system
8) Lower acquisition cost
- Each compressor can support more pumps.
- More energy-efficient without any change in production capacity
- The variable-speed motor can maximize the pump’s service life.
9) Supports local or remote operation.
10) Equipped with an operator handle, enabling fault diagnosis and parameter modification.
Parameters of the PVD‑specific series cryopumps
Model IG200F-XP IG200F IG250F IG320F Pumping speed
Pumping speed (L/s)
H₂O 4000 4000 6500 11000 N₂ 330 1500 2500 4000 H₂ 800 2200 3600 5000 Ar 275 1200 1800 3000 Pumping capacity Ar 1500 1000 2000 2800 Pumping
capacity(std.L)
H₂ 12 12 20 32 Cooling Time (Min) 90 90 110 120 Full Regeneration Time (Min) 150 150 130 150 Auto-regeneration technology There is There is There is There is Variable frequency technology There is There is There is There is Parameters of the Low-Temperature Pump Series for Ion Implantation
Model IG200FX IG250FX IG320FX Vacuum flange 200 250 320 Pumping speed
Pumping speed (L/s)
H₂O 4000 6500 11000 Air 2200 2200 3600 H₂ 3500 7000 13000 Ar 1150 1800 3000 Pumping capacity H₂
Pumping capacity (std.
15 25 35 Cooling Time (Min) 90 110 120 Full Regeneration Time (Min) 100 130 150 Fast Regeneration Time (Min) 50 90 75 Auto-regeneration technology There is There is There is Variable frequency technology There is There is There is
IG500 Cryopump
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IG500 Cryopump
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Company Address: No. 338, Qianfang Avenue, Xianhua Sub-district, Pujiang County, Jinhua City, Zhejiang Province
After-sales phone number:15727902022,0579-8419 3027,0551-62879130
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