• Medium-caliber Cryopump
  • Medium-caliber Cryopump
Medium-caliber Cryopump
Medium-caliber Cryopump
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Medium-caliber Cryopump

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Medium-caliber Cryopump

  • DESCRIPTION
  • 1. A positive displacement vacuum pump that requires no backing pump during operation.

    2. Requires regeneration.

    3. It exhibits different pumping speeds and pumping capacities for different gases.

    4. Supports the Modbus protocol.

     

    Model DZB630DZB720DZB750DZB800DZB900
    Pumping speed (L/s)N₂16,00021,00022,50026,00032,000
     H₂30,00039,00042,00046,00048,000
     Ar14,50019,00020,50023,50028,000
     H₂O43,00057,00062,00071,00090,000
    Ultimate pressure (pa) 10⁻⁷10⁻⁷10⁻⁷10⁻⁷10⁻⁷
    Maximum throughput (Pa·L/s)Ar2.6 × 10³2.6 × 10³2.6 × 10³2.7 × 10³2.8 × 10³
    Pumping capacity (Pa·L)Ar6.5×10⁸6.5×10⁸6.5×10⁸6.5×10⁸5×10⁸
     H₂1.2 × 10⁷1.2 × 10⁷1.2 × 10⁷1.0×10⁷1.0×10⁷
    Cooldown time (min) 150180220240180
    Pump port flange GB/ISOUVGUVGGB/ISOISO-F
    Weight of cryopump (Kg) 240250260265275
    Compressor unit HC100W×2HC100W×2HC100W×2HC100W×2HC100W×2

Medium-caliber Cryopump

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Medium-caliber Cryopump

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