Medium-caliber Cryopump
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Medium-caliber Cryopump
- DESCRIPTION
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1. A positive displacement vacuum pump that requires no backing pump during operation.
2. Requires regeneration.
3. It exhibits different pumping speeds and pumping capacities for different gases.
4. Supports the Modbus protocol.
Model DZB630 DZB720 DZB750 DZB800 DZB900 Pumping speed (L/s) N₂ 16,000 21,000 22,500 26,000 32,000 H₂ 30,000 39,000 42,000 46,000 48,000 Ar 14,500 19,000 20,500 23,500 28,000 H₂O 43,000 57,000 62,000 71,000 90,000 Ultimate pressure (pa) 10⁻⁷ 10⁻⁷ 10⁻⁷ 10⁻⁷ 10⁻⁷ Maximum throughput (Pa·L/s) Ar 2.6 × 10³ 2.6 × 10³ 2.6 × 10³ 2.7 × 10³ 2.8 × 10³ Pumping capacity (Pa·L) Ar 6.5×10⁸ 6.5×10⁸ 6.5×10⁸ 6.5×10⁸ 5×10⁸ H₂ 1.2 × 10⁷ 1.2 × 10⁷ 1.2 × 10⁷ 1.0×10⁷ 1.0×10⁷ Cooldown time (min) 150 180 220 240 180 Pump port flange GB/ISO UVG UVG GB/ISO ISO-F Weight of cryopump (Kg) 240 250 260 265 275 Compressor unit HC100W×2 HC100W×2 HC100W×2 HC100W×2 HC100W×2
Medium-caliber Cryopump
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Medium-caliber Cryopump
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