Large-caliber Cryopump
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Large-caliber Cryopump
- DESCRIPTION
-
1. A positive displacement vacuum pump that requires no backing pump during operation.
2. Requires regeneration.
3. It exhibits different pumping speeds and pumping capacities for different gases.
4. Supports the Modbus protocol.
Model DZB1000 DZB1250 DZB1320 DZB1600 DZB1800
Pumping speed
Pumping speed (L/s)
N₂
40,000 57,000 62,000 110,000 127,000 H₂ 56,000 60,000 65,000 100,000 125,000 Ar 35,000 47,000 51,000 77,000 97,000 H₂O 110,000 180,000 195,000 290,000 365,000 Ultimate vacuum degree
Ultimate pressure(pa)
10-7 10-7 10-7 10-7 10-7 Pumping capacity
Pumping
capacity(Pa-L)
Ar 6.5×10⁸
1.4×10⁷
9×10 9.7×10⁸ 1.5×10⁹ 1.8×10⁹ H₂ 1.5×10⁷ 1.6×10⁷ 2.5×10⁷ 3.0×10⁷ Cooling time
Cooldown time(min)
240 330 330 330 330 Pump outlet flange
Mounting flange
ISO-F ISO-F ISO-F ISO-F ISO-F Weight
Weight of cryopump(Kg)
290 380 420 1200 1600 Matching compressor
Compressor unit
HC100W×2 HC100W×4 HC100W×5 HC100W×7 HC100W×9
Large-caliber Cryopump
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Large-caliber Cryopump
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Company Address: No. 338, Qianfang Avenue, Xianhua Sub-district, Pujiang County, Jinhua City, Zhejiang Province
After-sales phone number:15727902022,0579-8419 3027,0551-62879130
Email:Marketing@bwokai.com
